Browsing by Author "Chiu, Y."

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A capacitive vibration-to-electricity energy converter with integrated mechanical switches
(2008-10-01)
Chiu, Y.
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Tseng, V. F. G.
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電控工程研究所
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Institute of Electrical and Control Engineering
Due to recent advances in low-power VLSI design technology, it has become feasible to power portable or remote electronic devices by scavenging the ambient energy. The design, fabrication and measurement of a capacitive vibration-to-electricity energy converter are presented in this paper. With a device area constraint of 1 cm(2) and an auxiliary battery supply of 3.6 V, the device was designed to generate an output power of 31 mu W with an output saturation voltage of 40 V. An external mass of 4 g was needed to adjust the device resonance to match the input vibration of 2.25 m s(-2) at 120 Hz. Mechanical contact switches were integrated onto the device to provide accurate charge-discharge energy conversion timing. The device was fabricated in SOI (silicon-on-insulator) wafers by deep silicon etching technology. Parasitic capacitance was minimized by partial back side substrate removal. Resonant frequencies of the fabricated device with and without the external mass agreed with the expected values. Without the external mass, the measured ac output power was 1.2 mu W with a load of 5 M Omega at 1870 Hz. Detailed circuit modeling and ac output power measurement of the devices with the external mass attached are in progress.
Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS
(2012)
Liou, C. H.
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Chiu, Y.
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Shieh, H. P. D.
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Chiou, J. C.
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電機資訊學士班
A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.
PDMS-based flexible energy harvester with Parylene electret and copper mesh electrodes
(2015-10-01)
Chiu, Y.
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Lee, M. H.
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Wu, S-H
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電機資訊學士班
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Undergraduate Honors Program of Electrical Engineering and Computer Science
Currently, most vibrational energy harvesters have rigid and resonant structures to scavenge kinetic energy from periodic motion in specific directions. However, in some situations the motion is random in amplitude, frequency, and direction; or the targeted energy sources apply direct deformation or displacement to the harvesters. In these applications, flexible energy harvesters that are light, flat, and conformable to arbitrary 3D surfaces of the sources are desired to scavenge the energy from device deformation, rather than the motion of a moving mass. Therefore we propose and demonstrate a PDMS-based flexible energy harvester with Parylene-C electret that can be attached to deformable surfaces. Furthermore, copper mesh is embedded in the flexible electrodes for robust electrode metallization as compared with traditional sputtered metal thin films. The fabricated harvesters achieved net output power of 2.2 mu W, area power density of 2.2 mu W cm(-2), and volume power density of 22 mu W cm(-3) at the maximum test frequency of 20 Hz. Power generation by finger tapping and bending was demonstrated. Such harvesters have the potential for wearable and implantable electronic applications.