Browsing by Author "Chiu, Y. -M."

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Investigation of the Atmospheric Helium Dielectric Barrier Discharge Driven by a Realistic Distorted-Sinusoidal Voltage Power Source
(2011-02-01)
Hung, C. -T.
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Chiu, Y. -M.
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Hwang, F. -N.
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Chiang, M. -H.
;
Wu, J. -S.
The non-equilibrium atmospheric-pressure parallel-plate helium dielectric barrier discharge (DBD) driven by a realistic 20 kHz distorted-sinusoidal voltage waveform has been investigated by means of simulations and experiments. A self-consistent one-dimensional fluid modeling code considering the non-local electron energy balance was applied to simulate the helium DBD. The effect of selecting plasma chemistry was investigated by comparing simulations with experiments. The results show that the simulations, which include more excited helium, metastable helium and electron-ion-related reaction channels, can faithfully reproduce the measured discharged temporal current quantitatively. Based on the simulated discharge properties, we have found that there is complicated mode transition of discharges from the long Townsend-like to the "dark current"-like, then to the short primary Townsend-like and the short secondary Townsend-like for the helium DBD that is driven by a realistic distorted-sinusoidal voltage power source. Discharge properties in different periods of discharge are discussed in detail in the paper.
Simulation of Excimer Ultraviolet (EUV) Emission from a Coaxial Xenon Excimer Ultraviolet Lamp Driven by Distorted Bipolar Square Voltages
(2010-12-01)
Jou, S. -Y.
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Hung, C. -T.
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Chiu, Y. -M.
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Wu, J. -S.
;
Wei, B. -Y.
Simulation of excimer ultraviolet (EUV) emission from a coaxial xenon excimer ultraviolet lamp driven by distorted bipolar square voltages is presented in this study. A self-consistent radial one-dimensional fluid model, considering local mean energy approximation (LMEA), along with a set of simplified xenon plasma chemistry was employed to simulate the discharge physics and chemistry. Emitted powers of EUV light and deposited powers to the charged species were simulated by varying the values of four key parameters, which include the driving frequency, gas pressure, gap distance and number of dielectric layers. Results show that there are three distinct periods that include pre-discharge, discharge and post-discharge ones. It is found that intensive EUV (172 nm) emission occurs during the early part of the discharge period, which correlates very well in time with the power deposition through electrons. In addition, power deposition through Xe(+) and Xe(2)(+) occurs mainly in the discharge period and later part of discharge period, respectively. Surprisingly, the emission efficiency of 172 nm increases slightly with increasing driving frequency of power source, while it increases dramatically with increasing gap distance. In addition, the maximal emission efficiency is found to take place at gas pressure of 600 torr. The emission efficiency of one-dielectric case is found to be better than that of two-dielectric one. The underlying mechanisms in the above observations are discussed in detail in the paper.