Browsing by Author "Chou, Hsiu-Yu"

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Characteristics of SrTiO(3) Insulated Layer in SBT Ferroelectric Thin Films
(2009-01-01)
Chou, Hsiu-Yu
;
Lee, En-Ko
;
Lin, Meng-Han
;
Tseng, Tseung-Yuen
;
電子工程學系及電子研究所
Low temperature processing of SBT thin films with SrTiO(3) (STO) seeded layer deposited onto Ir/SiO(2)/Si (MIM structure) and CeO(2)/Si (MFIS structure) substrate using MOD method was investigated. The Sr(0.8)Bi(2.6)Ta(2)O(9+x) (SBT) thin films with a STO seeded layer on MIM structure showed prefer (115) orientation, well crystalline and lower crystal temperature than those without STO seeded layer. The SBT thin films with STO seeded layer on MFIS structure also showed prefer (115), (006) orientation and well crystalline SBT phase annealed at 700 degrees C. The seeded layer, STO, effectively protected the evaporation of Bi through the Pt top electrode and diffusion of Bi into the Ir bottom electrode on MIM structure. It also can improve the crystallization of SBT phase, grain growth and lower crystallized temperature of SBT thin film. The memory window and leakage current densities of SBT thin films with STO seeded layers are improved significantly in comparison with those films without the STO seeded layer. In the MIM structure, the SBT thin film with STO seeded layer can decrease the leakage current density to 10-9 A/cm(2) at 100 kV/cm. In the MFIS structure, the SBT thin film with STO seeded layer also can improve the memory window and lead to lower leakage current at low voltage.
Characteristics of SrTiO3 Insulated Layer in SBT Ferroelectric Thin Films
(2009-01-01)
Chou, Hsiu-Yu
;
Lee, En-Ko
;
Lin, Meng-Han
;
Tseng, Tseung-Yuen
;
電子工程學系及電子研究所
Low temperature processing of SBT thin films with SrTiO3 (STO) seeded layer deposited onto Ir/SiO2/Si (MIM structure) and CeO2/Si (MFIS structure) substrate using MOD method was investigated. The Sr0.8Bi2.6Ta2O9+x (SBT) thin films with a STO seeded layer on MIM structure showed prefer (115) orientation, well crystalline and lower crystal temperature than those without STO seeded layer. The SBT thin films with STO seeded layer on MFIS structure also showed prefer (115), (006) orientation and well crystalline SBT phase annealed at 700 degrees C. The seeded layer, STO, effectively protected the evaporation of Bi through the Pt top electrode and diffusion of Bi into the Ir bottom electrode on MIM structure. It also can improve the crystallization of SBT phase, grain growth and lower crystallized temperature of SBT thin film. The memory window and leakage current densities of SBT thin films with STO seeded layers are improved significantly in comparison with those films without the STO seeded layer. In the MIM structure, the SBT thin film with STO seeded layer can decrease the leakage current density to 10-9 A/cm(2) at 100 kV/cm. In the MFIS structure, the SBT thin film with STO seeded layer also can improve the memory window and lead to lower leakage current at low voltage.
Photo-induced hydrophilicity of TiO2-N-x(x) thin films on PET plates
(2007-12-03)
Chou, Hsiu-Yu
;
Lee, En-Ko
;
You, Jiang-Wen
;
Yu, Sung-Shih
;
電子工程學系及電子研究所
TiO2-xNx thin films were deposited on PET (polyethylene terephthalate) plates by sputtering a TiN target in a N-2/O-2 plasma and without heating. X-ray photoemission spectroscopy (XPS) was used to investigate the N 1s, Ti 2p core levels and the nitrogen composition in the TiO2-xNx films. The results indicate that Ti-O-N bonds are formed in the thin films. Two nitrogen states, substitution and interstitial nitrogen atoms, were attributed to peaks at 396 and 399 eV, respectively. It was observed that the nitrogen atoms occupy both the substitutive and interstitial sites in respective of the nitrogen content in the thin films. UV-VIS absorption spectroscopy of PET coated thin films shows a significant shift of the absorption edge to lower energy in the visible-light region. UV and visible-light irradiation are used to activate PET coated thin films for the development of hydrophilicity. The photo-induced surface wettability conversion reaction of the thin films has been investigated by means of water contact angle measurement. PET plates coated with TiO2-xNx thin films are found to exhibit lower water contact angle than non-coated plates when the surface is illuminated with UV and visible light. The effects of nitrogen doping on photo-generated hydrophilicity of the thin films are investigated in this work. (C) 2007 Elsevier B.V. All rights reserved.