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Browsing by Author "Chou, Kuo-Ching"

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    The Effect of Oxygen Flow Rates on the Electrical Resistivity of MgO Thin Films in AC-PDPs
    (2006)
    Chou, Hong-Chieh
    ;
    Kim, Sung-O
    ;
    Chen, Kuang-Lang
    ;
    Chen, Samuel
    ;
    Lee, Chien-Pang
    Magnesium oxide thin films were deposited with different thickness and oxygen flow rates for investigation the effects of the electrical resistivity of MgO thin films in AC-PDPs. The surface roughness was characterized by AFM. It reveals that higher oxygen flow rate generates higher electrical resistivity of MgO thin films.