Browsing by Author "Chou, Shao-Heng"

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Investigation and Comparison of Work Function Variation for FinFET and UTB SOI Devices Using a Voronoi Approach
(2013-04-01)
Chou, Shao-Heng
;
Fan, Ming-Long
;
Su, Pin
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
Using a novel Voronoi method that can provide a more realistic representation of metal-gate granularity, we investigate and compare the impact of work-function variation (WFV) on FinFET and ultrathin body (UTB) silicon-on-insulator (SOI) devices. Our study indicates that, for a given electrostatic integrity and total effective gate area, the FinFET device exhibits better immunity to WFV than its UTB SOI counterpart. We further show that, unlike other sources of random variation, the WFV cannot be suppressed by equivalent oxide thickness scaling.