Browsing by Author "Chou, Ting-Wei"

Now showing 1 - 1 of 1

Characteristics of zirconium oxide gate ion-sensitive field-effect transistors
(2007-07-01)
Chang, Kow-Ming
;
Chao, Kuo-Yi
;
Chou, Ting-Wei
;
Chang, Chin-Tien
;
電子工程學系及電子研究所
In this study. the zirconium oxide (ZrO2) membrane has been successfully applied as a pH-sensitive layer for ion-sensitive field-effect transistors (ISFETs). It exhibited an excellent response range of 56.7-58.3 mV/pH from the fixed current measurement using HP4156A. The ZrO2 membrane prepared by direct current (DC) sputtering was used as a pH-sensitive film that showed good surface adsorption with oxide and silicon. The pH sensitivities slightly decreased in 1 M NaCl solution; however. the device showed a perfect linear response of 52.5 mV/pH. The linear pH sensitivity response was measured between pH 1 to 13 in a buffer solution that was provided by Riedel-deHan.