Browsing by Author "Chu, Nien-Nan"

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Applications of plasmonic hotspots on laser-treated AgOx thin film
(2012)
Tseng, Ming Lun
;
Huang, Yao-Wei
;
Hsiao, Min-Kai
;
Huang, Hsin Wei
;
Lin, Yu-Hsuan
The femto-second-laser-treated AgOx thin film is used as the plasmon-active substrate for the applications of surface-enhanced Raman scattering (SERS), molecule sensing, and photocatalyst. The proposed technique is helpful for the solar energy harvest, green energy source, and biosensing with high efficiency and throughput.
The study of compensative structure assisted convex and concave corner structures etching by Inductively Coupled Plasma-Reactive Ion Etch (ICP-RIE)
(2015)
Lin, Yu-Hsin
;
Cheng, Yuan-Chieh
;
Chu, Nien-Nan
;
Hsu, Wensyang
;
Tang, Yu-Hsiang
In this paper, the compensative structure assisted the convex and concave corner structures etch in inductively coupled plasma reactive ion etch (ICP-RIE) have been studied. In anisotropic silicon etching, under the Bosch patent, sequentially alternating etch and passivation cycles can easily achieve high aspect ratio silicon structures. But, the feature size of the convex and concave corner structures are difficult to maintain as original design at the bottom position in deep etch, due to non-vertical movement plasma etch. A compensative structure can obstruct the non-vertical plasma to etch the convex corner structures and reduce the etch lag effect during the etch process leading to better profile at deep etch. The current study systematically investigates plasma condition to verify feasibility of the proposed method, and discusses effect of the gap between compensative structure and convex and concave corner structures at three different gaps of 15, 10, 5 mu m. It demonstrate the compensative structure with small gap in front of the convex and concave corner structures have better profile at deep ICP-RIE etching.
Tunable fiber confocal sensor with LED
(2015-01-01)
Weng, Chun-Jen
;
Lan, Tzu-Hsien
;
Hwang, Chi-Hung
;
Chu, Nien-Nan
;
Huang, Chien-Yao
A novel concept of confocal sensor based on focal lens is proposed to measure the displacement. The light source is a stabilized fiber coupled LED. A 1x2 graded-index multimode fiber optic coupler is used in this sensor. One port is a LED input port via SMA connector, another port is a LED output port connected to a reflective collimator and the other port is a reflective sensor port connected to a photo detector. The focusing sensor head is the cascade of a focal lens and a 20X objective lens. In this confocal displacement sensor, LED passes through a focal lens and an objective lens so that the LED beam focuses at a fixed focal point. A test target is placed after the objective lens. The displacement between the sensor head and a target can be measured quickly by detecting the reflective power according to the confocal principle. The long-term stability of LED is under 0.5%. The effective back focal length is varied from 5.67mm to 6.57mm by 0-290mA current driving so that the measuring range is about 0.9mm. The FWHM resolution of displacement is about 50 mu m. This sensor has the features of low cost, high stability, high precision and compact.