Browsing by Author "Chu, Yu-Shan"

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Design and fabrication of a micro electrostatic vibration-toelectricity energy converter
(2006)
Chiu, Yi
;
Kuo, Chiung-Ting
;
Chu, Yu-Shan
;
電控工程研究所
;
Institute of Electrical and Control Engineering
This paper presents a micro electrostatic vibration-to-electricity energy converter. For the 3.3 V supply voltage and 1 cm(2) chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200 mu W/cm(2) for the optimal load of 8 M Omega. The device was fabricated in a silicon-on-insulator (SOI) wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Device design and fabrication processes are being refined.
MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter
(2007-07-01)
Chiu, Yi
;
Kuo, Chiung-Ting
;
Chu, Yu-Shan
;
電控工程研究所
;
Institute of Electrical and Control Engineering
This paper presents a micro electrostatic vibration-to-electricity energy converter based on the micro-electromechanical system. For the 3.3 V supply voltage and 1 cm 2 chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200 mu W/cm(2) for the optimal load of 8 M Omega. The device was fabricated in a silicon-on-insulator wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Fabrication processes are being refined to remove the back silicon substrate to eliminate residual particles and parasitic capacitance.