Browsing by Author "Fan, Long-Sheng"

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A GENERALIZED FOUNDRY CMOS PLATFORM FOR CAPACITIVELY-TRANSDUCED RESONATORS MONOLITHICALLY INTEGRATED WITH AMPLIFIERS
(2010)
Chen, Wen-Chien
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Chen, Che-Sheng
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Wen, Kuei-Ann
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Fan, Long-Sheng
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Fang, Weileun
A generalized foundry CMOS-MEMS platform suited for integrated micromechanical resonator circuits have been developed for commercial multi-user purpose and demonstrated with a fast turnaround time and a variety of design flexibilities for resonator applications. With this platform, different configurations of capacitively-transduced resonators monolithically integrated with their associated amplifier circuits, spanning frequencies from 500kHz to 14.5MHz, have been realized with resonator Q\'s around 2,000. This platform specifically featured with various configurations of structural materials, different arrangements of mechanical boundary conditions, large transduction area, well-defined anchors, and performance enhancement scaling with IC fabrication technology, offers a variety of flexible design options suited for sensor and RF applications.
A Monolithic CMOS MEMS Accelerometer with Low Noise Gain Tunable Interface in 0.18 mu m CMOS MEMS Technology
(2012)
Lin, Yi-Da
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Lin, Jian-Yuan
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Wang, Chun-Kai
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Fan, Long-Sheng
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Wen, Kuei-Ann
A monolithic capacitance accelerometer is fabricated in 0.18 mu m ASIC-compatible CMOS MEMS technology and, with the assistant of universal sensing system being developed in the proposed work. The new approach combines the Dual-Chopper amplifier and Correlated Double Sampling to alleviate 1/f noise and DC offset. The total noise equivalent acceleration is 13.49ug/root Hz under 500 Hz. The tunable sensitivity can be adjusted from 324.8 mV/fF to 17807.11mV/fF (differential mode) by the fully-differential variable gain amplifier (VGA).
A Monolithic CMOS/MEMS Accelerometer with Zero-g Calibration Readout Circuit
(2013-01-01)
Liu, Yu-Sian
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Huang, Chien-Jo
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Kuo, Fu-Yen
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Wen, Kuei-Ann
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Fan, Long-Sheng
A monolithic accelerometer design with zero-g calibration with TSMC 0.18 mu m mixed-signal 1P6M process is presented. On-chip digital offset calibration enables compensation of random mechanical offset in the sensor due to process variation. The maximum 21 fF capacitance mismatch can be calibrated. The simulation results show that the whole system have 452.1 mV/g sensitivity. The power consumption is about 1.16 mW. The output noise is 26.85 mu g/v Hz at 1KHz.
An energy saving scheme for long range and high data rate wireless sensor networks
(2007)
Lin, Li-Hsieh
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Tsou, Wen-An
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Fan, Long-Sheng
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Wuen, Wen-Shen
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Wen, Kuei-Ann
For increasing demands on transceiving coverage, reliability and high resolution of sensing data in modem wireless sensor network applications, a novel digital transceiver scheme for wireless sensor node with integration of WiMAX PHY QoS, and low-density parity check (LDPC) code had been proposed. It will be 67% energy saving to support high gain sensing amplifier thus to provide high resolution digitization of sensing data. With WiMAX based regulation, 30 mile transmission range and 74Mbps data rate for long range and high data rate wireless sensor networks can be achieved.
Integrated Accelerometer with Capacitance to Digital Interface Circuit Design based on monolithic 0.18 mu m CMOS MEMS technology
(2012)
Wang, Chun-Chieh
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Fan, Long-Sheng
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Wen, Kuei-Ann
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電子工程學系及電子研究所
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Department of Electronics Engineering and Institute of Electronics
A monolithic accelerometer with integrated capacitance to digital readout circuit implemented in mixed-signal MEMS process is proposed to demonstrate sensor-to-bit integration. The sensing range is from -5g to 5g and the variation of the capacitance is from 441.2fF to 470fF. The sensitivity of the accelerometer is 2.88fF/g. The capacitance value of the sensing range is readout by the capacitance to digital circuit to readout. The capacitance to time circuit of the sensitivity is 6.94us/pF which is equivalent to 20ns/1bit. The digital output can be obtained without analog to digital module, and thus with power saving advantage, the output signal can be directly interface to digital signal process.