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Browsing by Author "Fan, Sheng-Kai"

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    Temperature Instability of Amorphous In-Ga-Zn-O Thin Film Transistors
    (2013)
    Lee, Yih-Shing
    ;
    Fan, Sheng-Kai
    ;
    Chen, Chii-Wen
    ;
    Yen, Tung-Wei
    ;
    Lin, Horng-Chih
    In this paper, the temperature dependence of electrical behavior on amorphous In-Ga-Zn-O (a-IGZO) thin film transistors (TFTs) having plasma-enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS) oxide as the dielectric material was evaluated. Sub-threshold swing (SS) increases and Vth is negatively shifted as the temperature rises. Temperature-dependent sub-threshold characteristics were also observed for the fabricated a-IGZO TFTs. The increase in subthreshold current in a-IGZO TFTs is well described by the thermally activated electrons.