<link rel="stylesheet" href="styles.cf390c6bfbe7555f.css">

Browsing by Author "Fang, Hsin-Kai"

Now showing 1 - 1 of 1
  • Thumbnail Image
    Item type:Item,
    Laser Lift-Off Mechanisms of GaN Epi-Layer Grown on Pattern Sapphire Substrate
    (2015-01-01)
    Chang, Tai-Min
    ;
    Fang, Hsin-Kai
    ;
    Liao, Cheng
    ;
    Hsu, Wen-Yang
    ;
    Wu, YewChung Sermon
    Wafer bonding and laser lift-off (LLO) processes were employed to fabricate pattern sapphire thin-GaN light-emitting diodes LEDs (PT-LED). During the LLO process, the required laser energy for PT-LED was much higher than that for flat thin-GaN LED (FT-LED). The yield rate of PT-LED was low, and the leakage current was high. In this study, the laser lift-off mechanisms of PT-LEDs were investigated. (C) The Author(s) 2014. Published by ECS. All rights reserved.