Browsing by Author "Han, Chien-Yuan"

Now showing 1 - 7 of 7

Assessment of interface roughness during plasma etching through the use of real-time ellipsometry
(2011-01-15)
Han, Chien-Yuan
;
Lai, Chien-Wen
;
Chao, Yu-Faye
;
Leou, Ke-Ciang
;
Lin, Tsang-Lang
Real-time in situ ellipsometry was used to investigate the etching of SiO(2)/silicon wafers with a high concentration of Cl(2). We monitored the temporal trajectory of the ellipsometric parameter Delta and then selected several points for ex situ study using atomic force microscopy (AFM). There was a clearly observable transition period in the trajectory near the endpoint of the SiO(2)/Si interface. We studied the relationship between the ellipsometric parameter Delta and the same point in the AFM ex situ measurements. Three stages, thin film, the interface layer, and the substrate, were analyzed in this work. (C) 2010 Elsevier B.V. All rights reserved.
Determining thickness of films on a curved substrate by use of ellipsometric measurement
(2008-01-01)
Han, Chien-Yuan
;
Lee, Zhen-You
;
Chao, Yu-Faye
;
光電工程學系
;
Department of Photonics
The three intensity polarizer-sample-analyzer imaging ellipsometry is used to measure the ellipsometric parameters (Psi, Delta). In addition to the ellipsometric parameters, we introduce an extra angle alpha to measure the of the azimuth deviation of polarizer. After careful calibration, we found this deviation can indicate how much the surface normal slanted from the plane; then it can be used to deduce the thickness profile coated on a cylindrical lens. Using this technique, we. not only can determine the radius curvature of the curved surface, we also can calculate the thickness of the thin film coated on a curved surface.
Determining thickness of films on a curved substrate by use of ellipsometric measurements
(2009-06-10)
Han, Chien-Yuan
;
Lee, Zhen-You
;
Chao, Yu-Faye
;
光電工程學系
;
Department of Photonics
A three-intensity measurement technique has been employed in polarizer-sample-analyzer imaging ellipsometry to measure the two-dimensional ellipsometric parameters of a coated cylindrical lens. Since azimuth deviation a of a polarizer can also be measured with this three-intensity measurement technique, we tilted a well-calibrated thin-film wafer to identify the orientation of the measured a with respect to the incident plane. Using the analytic property of this measurement technique, we can correct the deviation and determine the thickness profile of the thin film coated on a cylindrical lens. (C) 2009 Optical Society of America
Developing a Phase and Intensity Measurement Technique with Multiple Incident Angles under Surface Plasmon Resonance Condition
(2013-01-01)
Han, Chien-Yuan
;
You, Du Cheng
;
Chen, Yi-Ren
;
Chao, Yu-Faye
;
光電工程學系
This work presents the application of a focused beam polarizer-sample-analyzer imaging ellipsometer in measuring the ellipsometric parameters under the surface plasmon resonance condition. By using a cylindrical lens to produce fan shaped beam with multiple incident angles, three-intensity measurement technique can measure the ellipsometric parameters against each incidence but without the need of calibrating the azimuth errors of polarizer and analyzer. As a result of multiple incident angles approach, the whole SPR curve can be obtained without rotating the sensor chip. The intensity and phase response in the air and water interface of the sensor chip were demonstrated, and almost all measured results are close to the theoretical model.
Generating Radially and Azimuthally Polarized Beams by Using a Pair of Lateral Displacement Beamsplitters
(2016-09-01)
Han, Chien-Yuan
;
Wei, Zhi-Hao
;
Hsu, Yung
;
Chen, Kun-Huang
;
Yeh, Chien-Hung
This paper proposes a modified polarization converter for generating radially and azimuthally polarized beams. Based on a Mach-Zehnder-like interferometric structure, the device consists of a pair of lateral displacement beamsplitters (LDBs) and two half-wave plates that manipulate the states of polarization of incident linearly polarized light. Through the coherent superposition of two orthogonal Hermite-Gaussian modes in the far field, radially and azimuthally polarized beams can be obtained simultaneously. A prototype was assembled to demonstrate the feasibility of the design. The proposed design has the advantage of having a simple, symmetric, compact, and robust structure. In addition, the introduction of LDBs substantially reduces the cost of this device. Moreover, the design can be applied to a broadband pulsed laser with considerable potential in high-power applications.
Post flight analysis of the surface plasmon resonance enhanced photoelastic modulated ellipsometry
(2007-02-20)
Chao, Yu-Faye
;
Han, Chien-Yuan
;
光電工程學系
;
Department of Photonics
A total internal reflection ellipsometer equipped with a photoelastic modulator (PEM) is installed to investigate the chemical activation and antibody immobilization process on thin gold films. We set up two detection channels in this configuration: one for real-time monitoring with a data rate of 1 set per second, and the other for post flight analysis with a data rate of 25,000 sets per second. More detailed information has been obtained through the post flight analysis technique during the chemical activation process. This surface plasmon resonance enhanced PEM ellipsometry provides higher sensitivity and temporal resolution. It is feasible to resolve a faster reaction such as chemical reaction or protein folding by the post flight analysis technique. (c) 2006 Elsevier B.V. All rights reserved.
Prism-hologram-prism sandwiched recording method for polarization-selective substrate-mode volume holograms with a large diffraction angle
(2018-08-06)
Hsu, Fan-Hsi
;
Han, Chien-Yuan
;
Chen, Kun-Huang
;
Hsu, Ken-Yuh
;
Chen, Jing-Heng
We propose a prism-hologram-prism sandwiched recording method for the fabrication of polarization-selective substrate-mode volume holograms with a large diffraction angle. In fabrication, the C-RT20 photopolymer is sandwiched between two 45 degrees-90 degrees-45 degrees prisms and the interference fringes can be easily recorded in the recording material. The experimental results are in good agreement with the theoretical predictions. The proposed method features of a reflection-type recording setup for a transmission element and belongs to a technique of longer-wavelength construction for shorter-wavelength reconstruction. In addition, the method is much easier than the traditional recording method of two incident beam interference and has application potential in holographic photonics. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement