Browsing by Author "He, Sailing"

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Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator
(2015)
Huang, Shen-Che
;
Huang, Qiangsheng
;
Ma, Keqi
;
Zhang, Jianhao
;
Shi, Yaocheng
The high contrast grating (HCG) mirror has been illustrated and characterized. The investigated parameters including grating periods and filling factors were calculated by finite-difference time-domain method. The two-dimension HCG was fabricated by electron-beam lithography and inductively coupled plasma process. The reflectivity of the fabricated HCG mirror was measured, resulting in around 200 nm bandwidth. The measured result also showed a good agreement with calculated one. This achievement was promising in developing the novel light emitters in the telecommunication region.
Two-dimensional designed fabrication of subwavelength grating HCG mirror on Silicon-on-insulator
(2016-01-01)
Huang, Shen-Che
;
Hong, Kuo-Bin
;
Lu, Tien-Chang
;
He, Sailing
;
光電工程學系
We designed and fabricated a two dimensional high contrast subwavelength grating (HCG) mirrors. The computer-aided software was employed to verify the structural parameters including grating periods and filling factors. From the optimized simulation results, the designed HCG structure has a wide reflection stopband (reflectivity (R) >90%) of over 200 nm, which centered at telecommunication wavelength. The optimized HCG mirrors were fabricated by electron-beam lithography and inductively coupled plasma process technique. The experimental result was almost consistent with calculated data. This achievement should have an impact on numerous photonic devices helpful attribution to the integrated HCG VCSELs in the future.