Browsing by Author "Hilfiker, James N."

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Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling
(2008-04-01)
Hsu, Shih-Hsin
;
Liu, En-Shao
;
Chang, Yia-Chung
;
Hilfiker, James N.
;
Kim, Young Dong
Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub-layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled-wave analysis and finite-element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.