Browsing by Author "Horng, Jeng-Haur"

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Analyses and experimental confirmation of removal performance of silicon oxide film in the chemical-mechanical polishing (CMP) process with pattern geometry of concentric groove pads
(2011-01-12)
Wei, Chin-Chung
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Horng, Jeng-Haur
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Lee, An-Chen
;
Lin, Jen-Fin
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機械工程學系
A Reynolds equation that considers both the smoothing hydrodynamic pressure and the pattern of surface topography at the polishing pads was used to solve the distribution of the hydrodynamic field. A three-body abrasion wear model for solving the removed thickness of silicon oxide films was also introduced to obtain the removal rate of SiO(2) film in a chemical-mechanical polishing (CMP) process. The suction hydrodynamic pressure field expands its region with increasing groove width and decreasing depth of grooves. The flow rate of the slurry was thus increased, and the removal rate also increased with an increased number of abrasive particles. The solid contact pressure was much higher than the hydrodynamic pressure. The three-body abrasion for the wear depth of a particle arises from the solid contacting pressure and is hence more important than the hydrodynamic pressure. The removal rate of the SiO(2) film was dominated by the number of abrasive particles, which was affected by the variation of the hydrodynamic pressure in addition to the wear depth controlled by the solid contact pressure. The thickness of the silicon oxide films removed increased with decreasing grooving width and depth. (C) 2010 Elsevier B.V. All rights reserved.
Design of a new micro single flute drill
(2014)
Lee, An-Chen
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Horng, Jeng-Haur
;
Nguyen Danh Tuyen
;
Hsiao, Kuo-Mo
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機械工程學系
A new micro single flute drill was presented in this study. For the convenience of developing a solid model, and doing a geometrical analysis, its geometry including the flute and flank surfaces is presented mathematically. According to the geometrical analysis, the normal clearance angles and normal rake angles along the cutting lip of the new micro dill are always invariant, and positive, respectively. Hence its cutting force in drilling is reduced. Furthermore, with only one main flute, the new micro drill gets stronger, and its cutting torque can be also decreased. Therefore it is expected that the tool life of the new micro drill is much longer than that of the conventional drill.
Robustness Analysis of Mixed Product Run-to-Run Control for Semiconductor Process Based on ODOB Control Structure
(2014-05-01)
Lee, An-Chen
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Horng, Jeng-Haur
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Kuo, Tzu-Wei
;
Chou, Nan-Hung
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機械工程學系
In this paper, we propose a unified framework for the mixed-product run-to-run (RtR) controller, which is called the output disturbance observer (ODOB) structure. Many mixed-product RtR controllers, such as product-based exponentially weighted moving average (PB-EWMA) threaded predictor corrector controller (t-PCC), cycle forecasting EWMA (CF-EWMA), and combined product and tool disturbance estimator (CPTDE), can fit in this framework. The relations of the above-mentioned controllers and the ODOB controller are discussed. Furthermore, based on the ODOB structure, we analyze the robust stable conditions and provide a systematic method for obtaining the optimal parameters that guarantee the optimal nominal performance under the robust stability. The simulation cases show that the output performances of PB-EWMA, t-PCC, CF-EWMA, and CPTDE controllers are improved by using the optimal weights obtained from the proposed approach.