Browsing by Author "Hsien, YL"

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Three electrodes touch-mode capacitive pressure sensor
(1998-12-01)
Chang, KM
;
Hwang, GJ
;
Hsien, YL
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
A three-electrode capacitive pressure sensor for touch-mode operation with sensitivity of 0.030 pF/kPa (or 10.4 mV/kPa using CP-10 C/V converter circuit) in the pressure range of 170-280 kPa is presented with theoretical explanation of experimental results. A special ring structure is designed to integrate a sensing capacitor and a reference capacitor into the same cavity to partially cancel out the temperature effect. A third electrode is included to eliminate two-level connections without reducing its pressure sensitivity. The sensor offers the advantages of simple fabrication processes, planar connections, as well as high sensitivity, near-linear output, and large over-range pressure.