Browsing by Author "Hsu, Lun-Hao"

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Formation, Rolling, and Agglomeration of a Co Seed Droplet in Patterned Inverted Silicon Nano-Pyramid
(2009)
Chen, C. C.
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Hsu, Lun-Hao
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Cheng, Y. T.
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電子工程學系及電子研究所
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Department of Electronics Engineering and Institute of Electronics
The paper presents upper and lower limitations of nominal radius of liquid drops for rolling along an inclination by considering specified dimensionless Bond number, gravitational force, and Gibbs free energy. The relations between the Bond number and Gibbs free energy are established in this paper to determine the region of nominal radius of seeding droplets and the conditions of rolling mechanism. Experimental results show nanometer sized Co seeds formed on a patterned nonwettable silicon inverted pyramid {111} surface under the specified conditions will roll down and then aggregate in the bottom of the inverted pyramid to form a singular seed, which is applicable for 1-D material growth control.
Gravity-Assisted Seeding Control for 1-D Material Growth
(2009-07-01)
Chen, C. C.
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Hsu, Lun-Hao
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Rern, Kai
;
Cheng, Y. T.
;
Hsieh, Yi-Fan
This letter presents a seeding control scheme by utilizing gravity force to form an agglomeration of molten Co seeds on a patterned inverted silicon nanopyramid. Nanometer sized molten Co seeds formed on a nonwettable inverted pyramid surface can roll along the inclination followed by aggregation to form a singular seed with the size depending on the pyramid size and the thickness of as-deposited Co film inside the pyramid. The proposed scheme allowing the formation of well-aligned catalytic seeds with manipulated size will promise the control growth of 1-D material for practical integrated microelectronic device fabrication.