Browsing by Author "Hsu, M. C."

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SU-8 serial MEMS switch for flexible RF applications
(2011-02-01)
Chao, Tzu-Yuan
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Hsu, M. C.
;
Lin, C-D
;
Cheng, Y. T.
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電子工程學系及電子研究所
This paper presents a novel SU-8 micromachining process for MEMS series switch fabrication. The switch is designed with a clamped-clamped SU-8 (5 mu m)/Cu (2 mu m)/SU-8 (3 mu m) beam structure driven by electrostatic force, which is fabricated on a silicon substrate with a resistivity of similar to 5 Omega cm. Experimental results show that the switch can exhibit better than -4.48 dB insertion loss and -28.2 dB isolation up to 12 GHz. Such a large insertion loss is mainly caused by substrate loss which can be further reduced down to -0.75 dB as long as the substrate resistivity is increased up to 100 Omega cm.
The Inductance Enhancement Study of Spiral Inductor Using Ni-AAO Nanocomposite Core
(2009-05-01)
Hsu, M. C.
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Chao, T. Y.
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Cheng, Y. T.
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Liu, C. M.
;
Chen, C.
The letter presents the fabrication and characterization of on-chip spiral inductors with Ni-anodic alumina oxide (Ni-AAO) nanocomposite core. Ni nanorods with 70 nm diameter are deposited and isolated in an AAO matrix to form a layer of nanocomposite on silicon substrate. About 3% inductance enhancement to the inductor with the nanocomposite core has been observed and the enhancement can be kept up more than 6 GHz. Because the proposed inductance enhancement scheme using ferromagnetic-AAO-based nanocomposite as inductor core employs a CMOS-compatible fabrication process with the characteristics that can be further improved, it is our belief that the scheme has a great potential application for future radio frequency integrated circuitry (RFIC) manufacture.