Browsing by Author "Hsu, Ying-Chien"

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High numerical-aperture microlens fabricated by focused ion beam milling
(2007-01-01)
Chiu, Yi
;
Huang, Chien-Hsun
;
Hsu, Ying-Chien
;
電控工程研究所
;
Institute of Electrical and Control Engineering
The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 mu m.
High numerical-aperture microlens fabricated by focused ion beam milling - art. no. 66200L
(2007)
Chiu, Yi
;
Huang, Chien-Hsun
;
Hsu, Ying-Chien
;
電控工程研究所
;
Institute of Electrical and Control Engineering
The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 mu m.