Browsing by Author "Hu, Sheng-Hsiang"

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Adhesion Investigation Between Metal and Benzocyclobutene (BCB) Polymer Dielectric Materials in 3-D Integration Applications
(2014-09-01)
Shih, Jian-Yu
;
Huang, Wen-Chun
;
Ko, Cheng-Ta
;
Yang, Zheng
;
Hu, Sheng-Hsiang
In this paper, the interfacial adhesion strength between metal layer and benzocyclobutene (BCB) polymer dielectric in 3-D integration applications is investigated. The effects of layer thickness, layer stacking order, and additional adhesion layer of titanium (Ti) layer between copper (Cu) and BCB polymer are investigated. Surprisingly, the conventional titanium adhesion layer commonly used in the semiconductor industry weakens the interfacial adhesion strength between copper and BCB. Additionally, to figure out the interfacial adhesion mechanisms, the interfacial structures probed by sum-frequency-generation vibrational spectroscopy are correlated to the adhesion strengths measured from corresponding sample interfaces. It is found that ordered C-H groups at the metal/BCB interface, such as titanium/BCB or molybdenum/BCB, lead to weak interfacial adhesion strength, whereas disordered interfaces, i.e., copper/BCB, lead to strong interfacial adhesion strength.
Preparation and characterization of thermal-sensitive ferrofluids for drug delivery application
(2007-03-01)
Liu, Ting-Yu
;
Hu, Shang-Hsiu
;
Hu, Sheng-Hsiang
;
Tsai, Szu-Ping
;
Chen, San-Yuan
Novel thermal-sensitive ferro fluids (F127-ferro fluids) consisting of core-shell-type magnetic nanoparticles dispersed in Pluronic F127-containing aqueous solution were prepared. The core (magnet)-shell (Pluronic F127) nanoparticles were synthesized by in situ coprecipitation process, which were characterized using transmission electron microscope, X-ray diffraction and vibrating sample magnetometer. The F127-ferro fluids gelled above the lower critical solution temperatures (LCST) of approximately 23-28 degrees C, which were higher than that of pure Pluronic F127-. fluids ( 21-25 degrees C). The increase in the LCST of the F127 ferro. fluids may be attributed to a result of a physical interaction between the F127 molecules and the core-shell magnetic nanoparticles. (C) 2006 Elsevier B. V. All rights reserved.