<link rel="stylesheet" href="styles.cf390c6bfbe7555f.css">

Browsing by Author "Huang, Chang Yu"

Now showing 1 - 1 of 1
  • Thumbnail Image
    Item type:Item,
    The crystallization mechanism of poly-Si thin film using high-power Nd : YAG laser with Gaussian beam profile
    (2007)
    Zan, Hsiao Wen
    ;
    Huang, Chang Yu
    ;
    Saito, Kazuya
    ;
    Tamagawa, Kouichi
    ;
    Chen, Jack
    This paper studies the poly-Si crystallization mechanism under the high power (200 W) Nd:YAG solid state pulsed laser annealing system. It is found that the Gaussian-distributed laser beam profile successfully produce large super lateral growth process window. The devices in the SLG process window exhibit an electron field-effect mobility around 250 cm(2)/V.s and a threshold voltage lower than 1 V. The influence of a-Si film thickness and the laser scan pitch on the process window is also carefully investigated.