Browsing by Author "Huang, Hsuan-Han"

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A New Design of a Submicropositioner Utilizing Electromagnetic Actuators and Flexure Mechanism
(2010-01-01)
Chen, Mei-Yung
;
Huang, Hsuan-Han
;
Hung, Shao-Kang
;
機械工程學系
;
Department of Mechanical Engineering
In this paper, a novel XY-dimensional submicropositioner, including mechanism, control, and analysis, is successfully presented. The design of the submicropositioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and optical sensors to achieve the object of 3-DOF precise motion. From the provided experimental results, there are several main goals that have been achieved in this paper: 1) to integrate the electromagnetic actuator and the parallel flexure mechanism for planar positioning system; 2) to establish the mathematical modeling; 3) to develop an advanced adaptive sliding-mode controller; and 4) to perform extensive experiments to test the realistic performance.