Browsing by Author "Huang, Tzung Bin"

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Performance improvement of CoTiO3 high-k dielectrics with nitrogen incorporation
(2007)
Chen, Jian Hao
;
Huang, Tzung Bin
;
Wu, Xiaohua
;
Landheer, Dolf
;
Lei, Tan Fu
In this paper, three approaches to incorporating nitrogen in CoTiO3 high-k dielectric films, ion implantation of N-2(+), ion implantation of N+, and N2O plasma treatment have been investigated for the new CoTiO3 high-k dielectrics. All three methods reduced the leakage currents and improved the breakdown characteristics but the N2O-plasma treatment produced the best-behaved C-V curves, when compared to the untreated control samples. (c) 2006 The Electrochemical Society.