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Browsing by Author "Huang, Wei-Cheng"

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    A New and Simple DC Method for Thermal-Resistance Extraction of Scaled FinFET Devices
    (2018-01-01)
    Huang, Wei-Cheng
    ;
    Su, Pin
    ;
    電子工程學系及電子研究所
    ;
    Department of Electronics Engineering and Institute of Electronics
    This work proposes a new and simple hot-chuck measurement method for the extraction of the thermal resistance of FinFETs. The intrinsic transconductance that eliminates the parasitic source/drain resistance effect can serve as a temperature sensor to characterize the device temperature rise due to self-heating. Our method requires only DC measurements without the need of special test structures.