Browsing by Author "Huang, Yu-Feng"

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Characterizations of polycrystalline silicon nanowire thin-film transistors enhanced by metal-induced lateral crystallization
(2012-11-01)
Su, Chun-Jung
;
Huang, Yu-Feng
;
Lin, Horng-Chih
;
Huang, Tiao-Yuan
;
電子工程學系及電子研究所
In this paper, we present a comprehensive study on the effects of layout design and re-crystallization temperature on the material and electrical characteristics of polycrystalline silicon thin-film transistors (poly-Si TFTs) with metal-induced lateral crystallized (MILC) nanowire (NW) channels. It is found that the off-state leakage current shows strong dependence on the arrangement of MILC seeding windows, while the number of smaller solid-phase-crystallized (SPC) grains in the channel is reduced by lowering the re-crystallization temperature, thus improving the on-state behavior. Moreover, owing to the spatial confinement for MILC fronts, small cross-section of the NW channel would result in little lateral crystallization, and thus retarding the enhancement in performance of MILC NW devices. (c) 2012 Elsevier Ltd. All rights reserved.