Browsing by Author "Hung, Chien-Chung"

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A comprehensive study on the oxidation of 4H-SiC in diluted N2O ambient
(2017-04-01)
Tseng, Yuan-Hung
;
Wu, Tsung-Han
;
Tsui, Bing-Yue
;
Yen, Cheng-Tyng
;
Hung, Chien-Chung
The oxidation mechanism of 4H-SiC in diluted N2O ambient was studied at various temperatures, N2O flow rates, and N-2/N2O flow ratios. The collision partner, N-2 in this study, plays crucial roles in determining the oxidation rate and N-incorporation. According to the proposed oxidation mechanism, lowering the interface state density at lower oxidation temperatures is possible with a high-efficiency collision partner. (C) 2017 The Japan Society of Applied Physics
A comprehensive study on the oxidation of 4H-SiC in diluted N2O ambient
(2017-04)
Tseng, Yuan-Hung
;
Wu, Tsung-Han
;
Tsui, Bing-Yue
;
Yen, Cheng-Tyng
;
Hung, Chien-Chung
The oxidation mechanism of 4H-SiC in diluted N2O ambient was studied at various temperatures, N2O flow rates, and N-2/N2O flow ratios. The collision partner, N-2 in this study, plays crucial roles in determining the oxidation rate and N-incorporation. According to the proposed oxidation mechanism, lowering the interface state density at lower oxidation temperatures is possible with a high-efficiency collision partner. (C) 2017 The Japan Society of Applied Physics