Browsing by Author "Hung, Kuo-Yung"

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Design and Fabrication of a Small-Form-Factor Optical Pickup Head
(2009-05-01)
Chiu, Yi
;
Shih, Hsi-Fu
;
Chiou, Jin-Chern
;
Cheng, Shih-Tung
;
Hung, Kuo-Yung
This paper presents the design and fabrication of a small-form-factor optical pickup head (OPH) for both red and blue wavelength. A holographic optical element (HOE) is used for beam splitting, aberration correction, and servo-signal generation to reduce the number of components and simplify the assembly procedure. In addition to demonstrating this OPH by using existing discrete components, several key components and processes are developed to use micro-electro-mechanical system (MEMS) technology to facilitate batch fabrication and wafer level assembly of the micro OPU.
Immersion Lithography Apparatus and Tank Thereof
(2010-04-08)
Hung, Kuo-Yung
;
Tseng, Fan-Gang
A tank for an immersion lithography apparatus provided. The tank has a container with a bottom plate and side plates connected to each, wherein the side plates surround and connect all edges of the bottom plate. The container is filled in at least a liquid having a refractive index thereof from about 1.4 to about 1.8. A platform is located in the container and immersed in the liquid. The platform has an axle fastened on a side thereof parallel to the bottom plate, wherein the axle passes through a bearing hole penetrated through one of the side plates. A roller disposed outside the container connects to the axle to rotate the axle, and furthermore, to incline the platform accordingly.
Optimum electrostatic force control for fabricating a hybrid UV-curable aspheric lens
(2010-07-01)
Hung, Kuo-Yung
;
Chang, Liang-Wei
;
Tseng, Fan-Gang
;
Chiou, Jin-Chern
;
Chiu, Yi
The purpose of this paper is to use a hybrid structure and the electrostatic force to fabricate aspheric lenses with high optical transmittance (95% at 405 nm). The hybrid structure is composed of Norland Optical Adhesive 63 (NOA63) (refractive index: 1.5802 at 405 nm) and BK-7 glass (refractive index: 1.5302). OSLO (Optics Software for Layout and Optimization) and CFD (Computational Fluid Dynamics) software packages were used to simulate the electric field gradient between the top and bottom electrodes and to produce the optimum bottom electrode design. Different electrode designs were also tested in order to optimize the morphology of the lens profile. The resulting lens profiles have clear apertures of approximately 0.92 mm with maximum shape errors of less than 0.18% and the spot size of the fabricated aspheric lenses can be controlled to approximately 0.504 mu m. This technology can be used as a generic approach to fabricate lenses for applications in various micro-optical systems.