Browsing by Author "Hung Kuo-Yung"

Now showing 1 - 4 of 4

Immersion lithography apparatus and tank thereof
(2012-05-29)
Hung Kuo-Yung
;
Tseng Fan-Gang
A tank for an immersion lithography apparatus provided. The tank has a container with a bottom plate and side plates connected to each, wherein the side plates surround and connect all edges of the bottom plate. The container is filled in at least a liquid having a refractive index thereof from about 1.4 to about 1.8. A platform is located in the container and immersed in the liquid. The platform has an axle fastened on a side thereof parallel to the bottom plate, wherein the axle passes through a bearing hole penetrated through one of the side plates. A roller disposed outside the container connects to the axle to rotate the axle, and furthermore, to incline the platform accordingly.
Immersion lithography apparatus and tank thereof
(2014-06-17)
Hung Kuo-Yung
;
Tseng Fan-Gang
An immersion lithography apparatus including a container, at least a liquid, a platform, a fixture, a roller, a light source, and a filter is provided. The container includes a bottom plate, a plurality of side plates, and a bearing hole penetrated through one of the side plates. The liquid is filled in the container. The platform is immersed in the liquid. The platform includes a pair of axles. The axles are parallel to the bottom plate. One of the axles passes through the bearing hole. The fixture is mounted on the platform for clamping a mask and a wafer. The roller is connected to the axle, passes through the bearing hole, and is operated to rotate the connected axle. The light source generates ultraviolet light to incident on the mask and the wafer. The filter is located between the light source and the fixture.
Immersion Lithography Apparatus and Tank Thereof
(2012-07-12)
Hung Kuo-Yung
;
Tseng Fan-Gang
A tank for an immersion lithography apparatus provided. The tank has a container with a bottom plate and side plates connected to each, wherein the side plates surround and connect all edges of the bottom plate. The container is filled in at least a liquid having a refractive index thereof from about 1.4 to about 1.8. A platform is located in the container and immersed in the liquid. The platform has an axle fastened on a side thereof parallel to the bottom plate, wherein the axle passes through a bearing hole penetrated through one of the side plates. A roller disposed outside the container connects to the axle to rotate the axle, and furthermore, to incline the platform accordingly.
Lens Device and Method of Manufacturing the Same
(2012-12-20)
Hung Kuo-Yung
;
Tseng Fan-Gang
A lens device and a method of manufacturing the same are provided, wherein the lens device includes a transparent substrate, a metal layer, a hydrophobic layer and an aspherical lens. The metal layer is formed on the transparent substrate, and the hydrophobic layer is formed on the metal layer. The metal layer has a first opening, such that an area of the transparent substrate corresponding to the first opening is not covered by the metal layer. The hydrophobic layer has a second opening connected to the first opening, and the second opening is larger than the first opening, such that a portion of the metal layer adjacent to a peripheral edge of the first opening is not covered by the hydrophobic layer. The aspherical lens is formed on the area of the transparent substrate and contacts the portion of the metal layer.