Browsing by Author "Jeng, JJ"

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A novel structure for three-dimensional silicon magnetic transducers to improve the sensitivity symmetry
(1996-09-01)
Lin, HY
;
Lei, TF
;
Jeng, JJ
;
Pan, CL
;
Chang, CY
A three-dimensional silicon magnetic transducer with symmetric sensitivities in the x-, y- and z-directions and small cross sensitivity has been demonstrated. Devices are based on a design of a vertical Hall structure using the surrounding trench and symmetric design to suppress the cross sensitivity. The fabrication process is simple and can be used as a part of a standard integrated circuit process. The results show that almost equal sensitivities in all three components of magnetic field can be obtained by coating Ni/Co thin films on the backside of the substrates. The cross sensitivity is only 1.3% of the sensitivity.
A novel structure for three-dimensional silicon magnetic transducers to improve the sensitivity symmetry
(1996-09-01)
Lin, HY
;
Lei, TF
;
Jeng, JJ
;
Pan, CL
;
Chang, CY
A three-dimensional silicon magnetic transducer with symmetric sensitivities in the x-, y- and z-directions and small cross sensitivity has been demonstrated. Devices are based on a design of a vertical Hall structure using the surrounding trench and symmetric design to suppress the cross sensitivity. The fabrication process is simple and can be used as a part of a standard integrated circuit process. The results show that almost equal sensitivities in all three components of magnetic field can be obtained by coating Ni/Co thin films on the backside of the substrates. The cross sensitivity is only 1.3% of the sensitivity.