Browsing by Author "Jou, M. J."

Now showing 1 - 1 of 1

Nano-roughening n-side surface of AlGaInP-based LEDs for increasing extraction efficiency
(2007-03-25)
Lee, Y. J.
;
Lu, T. C.
;
Kuo, H. C.
;
Wang, S. C.
;
Hsu, T. C.
A chemical wet etching technique is presented to form a nano-roughened surface with triangle-like morphology on n-side-up AlGaInP-based LEDs fabricated by adopting adhesive layer bonding scheme. A simple and commonly used H3PO4-based solution was applied for chemical wet etching. The morphology of nano-roughened surfaces is analyzed by the atomic force microscope (AFM) and significantly related to the enhancement factor of the LED output power. The output power shows 80% increase after optimizing the nano-roughened morphology of n-side surface, as compared to the ordinary flat surface LED. (c) 2006 Elsevier B.V. All rights reserved.