Browsing by Author "KUO Chien-I"
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Item type:Item, GATE STRUCTURE(2015-08-20) ;CHANG Yi ;KUO Chien-IHSU Heng-TungThe present invention discloses a gate structure, which is applied for an electronic component comprising a substrate and an active region defined thereon, and such the gate structure is disposed in the active region and is a T-shaped gate having a stem with a height of 250 nm. Preferably, the gate structure has a gate length of 60 nm.