Browsing by Author "Koyama, Fumio"

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Fabrication of SiC Membrane HCG Blue Reflector Using Nanoimprint Lithography
(2015-01-01)
Lai, Ying-Yu
;
Matsutani, Akihiro
;
Lu, Tien-Chang
;
Wang, Shing-Chung
;
Koyama, Fumio
We designed and fabricated a suspended SiC-based membrane high contrast grating (HCG) reflectors. The rigorous coupled-wave analysis (RCWA) was employed to verify the structural parameters including grating periods, grating height, filling factors and air-gap height. From the optimized simulation results, the designed SiC-based membrane HCG has a wide reflection stopband (reflectivity (R) > 90%) of 135 nm for the TE polarization, which centered at 480 nm. The suspended SiC-based membrane HCG reflectors were fabricated by nanoimprint lithography and two-step etching technique. This achievement should have an impact on numerous III-N based photonic devices operating in the blue wavelength or even ultraviolet region.