Browsing by Author "Krusin-Elbaum, Lia"

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The fabrication of a programmable via using phase-change material in CMOS-compatible technology
(2010-04-02)
Chen, Kuan-Neng
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Krusin-Elbaum, Lia
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電子工程學系及電子研究所
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Department of Electronics Engineering and Institute of Electronics
We demonstrate an energy-efficient programmable via concept using indirectly heated phase-change material. This via structure has maximum phase-change volume to achieve a minimum on resistance for high performance logic applications. Process development and material investigations for this device structure are reported. The device concept is successfully demonstrated in a standard CMOS-compatible technology capable of multiple cycles between on/off states for reconfigurable applications.