Browsing by Author "Ku, Jui-Tai"

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Cathodoluminescence studies of GaAs nano-wires grown on shallow-trench-patterned Si
(2010-11-19)
Lee, Ling
;
Fan, Wen-Chung
;
Ku, Jui-Tai
;
Chang, Wen-Hao
;
Chen, Wei-Kuo
The optical properties of GaAs nano-wires grown on shallow-trench-patterned Si(001) substrates were investigated by cathodoluminescence. The results showed that when the trench width ranges from 80 to 100 nm, the emission efficiency of GaAs can be enhanced and is stronger than that of a homogeneously grown epilayer. The suppression of non-radiative centers is attributed to the trapping of both threading dislocations and planar defects at the trench sidewalls. This approach demonstrates the feasibility of growing nano-scaled GaAs-based optoelectronic devices on Si substrates.
Cathodoluminescence studies of GaAs nano-wires grown on shallow-trench-patterned Si
(2010-11-19)
Lee, Ling
;
Fan, Wen-Chung
;
Ku, Jui-Tai
;
Chang, Wen-Hao
;
Chen, Wei-Kuo
The optical properties of GaAs nano-wires grown on shallow-trench-patterned Si(001) substrates were investigated by cathodoluminescence. The results showed that when the trench width ranges from 80 to 100 nm, the emission efficiency of GaAs can be enhanced and is stronger than that of a homogeneously grown epilayer. The suppression of non-radiative centers is attributed to the trapping of both threading dislocations and planar defects at the trench sidewalls. This approach demonstrates the feasibility of growing nano-scaled GaAs-based optoelectronic devices on Si substrates.
Dependence of GaN Defect Structure on the Growth Temperature of the AlN Buffer Layer
(2008)
Wong, Yuen-Yee
;
Chang, Edward Yi
;
Yang, Tsung-Hsi
;
Chang, Jet-Rung
;
Chen, Yi-Cheng
The defect structure of the GaN film grown on sapphire by plasma-assisted molecular beam epitaxy (PAMBE) technique was found to be dependent on the AlN buffer layer growth temperature. This buffer growth temperature controlled the defect density in GaN film but had shown contrary effects on the density of screw threading dislocation (TD) and edge TD. The density of screw TD was high on lower temperature buffer but low on the higher temperature buffer. Meanwhile the density of edge TD had shown the opposite. Further examinations have suggested that the defect structure was closely related to the stress in the GaN film, which can be controlled by the growth temperature of the AlN buffer. Using the 525 degrees C AlN buffer, optimum quality GaN Film with relatively low screw and edge TDs were achieved.
Dislocation reduction in GaN film using Ga-lean GaN buffer layer and migration enhanced epitaxy
(2011-07-29)
Wong, Yuen-Yee
;
Chang, Edward Yi
;
Wu, Yue-Han
;
Hudait, Mantu K.
;
Yang, Tsung-Hsi
A GaN buffer layer grown under Ga-lean conditions by plasma-assisted molecular beam epitaxy (PAMBE) was used to reduce the dislocation density in a GaN film grown on a sapphire substrate. The Ga-lean buffer, with inclined trench walls on its surface, provided an effective way to bend the propagation direction of dislocations, and it reduced the dislocation density through recombination and annihilation processes. As a result, the edge dislocation density in the GaN film was reduced by approximately two orders of magnitude to 2 x 10(8) cm(-2). The rough surface of the Ga-lean buffer was recovered using migration enhanced epitaxy (MEE), a process of alternating deposition cycle of Ga atoms and N(2) radicals, during the PAMBE growth. By combining these two methods, a GaN film with high-crystalline-quality and atomically-flat surface can be achieved by PAMBE on a lattice mismatch substrate. (C) 2011 Elsevier B.V. All rights reserved.
Epitaxial Overgrowth of Gallium Nitride Nano-Rods on Silicon (111) Substrates by RF-Plasma-Assisted Molecular Beam Epitaxy
(2010)
Ku, Jui-Tai
;
Yang, Tsung-Hsi
;
Chang, Jet-Rung
;
Wong, Yuen-Yee
;
Chou, Wu-Ching
Strain-free gallium nitride (GaN) overgrowth on GaN nano-rods is realized by RF-plasma assisted molecular beam epitaxy (RF-MBE) on silicon (Si) substrate. The strain-free condition was identified by the strong free A exciton (FX(A)) photoluminescence (PL) peak at 3.478 eV and the E(2) high phonon Raman shift of 567 cm(-1). It is clearly demonstrated that the critical diameter of GaN nano-rods is around 80nm for the overgrowth of strain-free GaN. The blue-shift of PL peak energy and phonon Raman energy with decreasing the diameter of nano-rod result from the strain relaxation of overgrowth GaN. (C) 2010 The Japan Society of Applied Physics
The effect of AlN buffer growth parameters on the defect structure of GaN grown on sapphire by plasma-assisted molecular beam epitaxy
(2009-03-01)
Wong, Yuen-Yee
;
Chang, Edward Yi
;
Yang, Tsung-Hsi
;
Chang, Jet-Rung
;
Chen, Yi-Cheng
The defect structure of GaN film grown on sapphire by plasma-assisted molecular beam epitaxy (PAMBE) depends on the growth temperature and thickness of the aluminum nitride (AlN) buffer layer. High-resolution X-ray diffraction was used to measure symmetric (0 0 0 2) and asymmetric (1 0 (1) over bar 2) rocking curve (omega-scans) broadening, which allowed the estimation of screw threading dislocation (TD) and edge TD densities, respectively. For GaN grown on lower-temperature buffer, the density of screw TD was increased while the density of edge TD was decreased. Further examinations revealed that the edge TD was closely related to stress in GaN film and the screw TD was controlled by AlN surface roughness. Since the GaN defect was dominated by edge TD, the total TD was also effectively suppressed with the use of lower-temperature buffer with appropriate thickness. (C) 2009 Elsevier B.V. All rights reserved.
The Roles of Threading Dislocations on Electrical Properties of AlGaN/GaN Heterostructure Grown by MBE
(2010)
Wong, Yuen-Yee
;
Chang, Edward Yi
;
Yang, Tsung-Hsi
;
Chang, Jet-Rung
;
Ku, Jui-Tai
The role played by different types of threading dislocations (TDs) on the electrical properties of AlGaN/GaN heterostructure grown by plasma-assisted molecular beam epitaxy (MBE) was investigated. Samples with different defect structures and densities were prepared and measurements were taken from the same sample to study the correlative behavior of various TDs. From the Hall measurement, the electron mobility in two-dimensional electron gas channel was mainly controlled by the edge dislocation, which has a dominant amount in the material. The edge TDs acted as Coulomb scattering centers inside the channel and reduces the carrier mobility and increased its resistance. Screw TDs played a much significant role than edge TDs in determining the reverse-bias leakage current of Schottky barrier diodes. Leakage current is affected slightly by the reduction of free carrier density in the channel for samples with a higher edge TD density, but screw TD, which acted as the current leakage path, was more deleterious to the reverse-bias leakage current of AlGaN/GaN structure. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3392365] All rights reserved.