Browsing by Author "Ku, Kai-Ning"

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Characterization of Silicon Photonics Modulator Integration and High Efficiency Testing Platform
(2019-01-01)
Chen, Shang-Chun
;
Wun, Sin-Jhu
;
Hsu, Chih-Hsiang
;
Lin, Chen-Yu
;
Zhang, Jie
We successfully establish a silicon photonics device manufacturing and testing platform in 200mm SOI wafer. We integrate modulator and driver chip to show 30Gbis PAM4 capability. A fully-automatic wafer level characterization process is built up for all optical devices in surface coupling method.