Browsing by Author "Ku, Pei-Cheng"

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GaN Micromechanical Resonators with Meshed Metal Bottom Electrode
(2015-03-01)
Ansari, Azadeh
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Liu, Che-Yu
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Lin, Chien-Chung
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Kuo, Hao-Chung
;
Ku, Pei-Cheng
This work describes a novel architecture to realize high-performance gallium nitride (GaN) bulk acoustic wave (BAW) resonators. The method is based on the growth of a thick GaN layer on a metal electrode grid. The fabrication process starts with the growth of a thin GaN buffer layer on a Si (111) substrate. The GaN buffer layer is patterned and trenches are made and refilled with sputtered tungsten (W)/silicon dioxide (SiO2) forming passivated metal electrode grids. GaN is then regrown, nucleating from the exposed GaN seed layer and coalescing to form a thick GaN device layer. A metal electrode can be deposited and patterned on top of the GaN layer. This method enables vertical piezoelectric actuation of the GaN layer using its largest piezoelectric coefficient (d(33)) for thickness-mode resonance. Having a bottom electrode also results in a higher coupling coefficient, useful for the implementation of acoustic filters. Growth of GaN on Si enables releasing the device from the frontside using isotropic xenon difluoride (XeF2) etch and therefore eliminating the need for backside lithography and etching.
Large area lighting applications with organic dye embedded flexible film
(2015-01-01)
Lin, Huang-Yu
;
Tu, Zong-Yi
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Ku, Pei-Cheng
;
Lin, Chien-Chung
;
Kuo, Hao-Chung
A flexible large area lighting devices have been demonstrated by PDMS films. The (polydimethylsiloxane) PDMS films doped with organic/inorganic materials. The PDMS film is favorable due to its heat stability, good transparency, and flexibility. This study aimed to combine both organic and inorganic materials for flexible large area lighting applications. The architecture consists of blue LEDs coupled to a leaky waveguide that is covered with the PDMS film. The white light was generated with the poly (9, 9-dioctylfluorene-co-benzothiadiazole) F8BT blended into the PDMS slurry. Organic wavelength conversion materials were chosen owing to their ability to decompose in nature. The more conventional inorganic phosphors such as YAG are difficult to decompose and may present environmental issues which can bring concerns in many lighting applications. These flexible PDMS films had thicknesses of 100 mu m, 440 mu m, and 980 mu m. The resulting white light devices had color temperatures of 8944K, 4863K, and 4429K, respectively. In this study, we have also compared the performance of the organic versus conventional YAG phosphor embedded films.
Wavelength tunable InGaN/GaN nano-ring LEDs via nano-sphere lithography
(2017-03-03)
Wang, Sheng-Wen
;
Hong, Kuo-Bin
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Tsai, Yu-Lin
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Teng, Chu-Hsiang
;
Tzou, An-Jye
In this research, nano-ring light-emitting diodes (NRLEDs) with different wall width (120 nm, 80 nm and 40 nm) were fabricated by specialized nano-sphere lithography technology. Through the thinned wall, the effective bandgaps of nano-ring LEDs can be precisely tuned by reducing the strain inside the active region. Photoluminescence (PL) and time-resolved PL measurements indicated the lattice-mismatch induced strain inside the active region was relaxed when the wall width is reduced. Through the simulation, we can understand the strain distribution of active region inside NRLEDs. The simulation results not only revealed the exact distribution of strain but also predicted the trend of wavelength-shifted behavior of NRLEDs. Finally, the NRLEDs devices with four-color emission on the same wafer were demonstrated.