Browsing by Author "Kuo, C. F."

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Development of novel cascade structure for improving stroke of electrostatic comb-drive actuator
(2008)
Chiou, J. C.
;
Kuo, C. F.
;
Lin, Y. J.
;
Chang, C. W.
;
Hou, K. C.
In this study, a novel cascade structure for improving the stroke of electrostatic comb-drive actuator is proposed. With the cascade configuration, the stroke can be improving efficiency. The proposed actuators were fabricated through CMOS processes and post-CMOS micromachining steps. Experimental results indicated that the stroke of the lateral and vertical cascade electrostatic comb-drive actuators can be improved 180% and 188% respectively without adding extra driving voltage. These results demonstrated that the proposed cascade configurations have the capability to improve the actuation stroke of electrostatic actuators.