Browsing by Author "Kuo, Chao-Hui"

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Glass biochip fabrication by laser micromachining and glass-molding process
(2012-03-01)
Huang, Chien-Yao
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Kuo, Chao-Hui
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Hsiao, Wen-Tse
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Huang, Kuo-Cheng
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Tseng, Shih-Feng
Due to their low cost, small size, and high-speed performance, biochips are often used in various bio-experiments. Compared with polymer-based biochips, glass-based substrates are less sensitive to heat and organic environments. This study presents a hybrid processing approach that uses laser micromachining (LMM) and precision glass molding (PGM) techniques to mass-produce glass-based biochips. A silicon carbide (SiC) mold with an outside diameter of 20 mm was used to hot emboss biochip channels measuring 200 mu m wide and 185 mu m deep. This study also identifies the optimal conditions for glass molding when processing soda-lime glass for biochip applications, and discusses the influence of the major processing parameters on biochip channel depth. This study uses the Taguchi method to assess the effects of several molding parameters on larger-the-better performance characteristics. The experiments in this study consider the effects of several molding parameters, such as molding temperature, pressing force, moving speed, temperature holding time, and vacuum environment, to achieve optimum characteristics for biochip channels. Orthogonal array analysis indicates that the optimal process parameters includes a 620 degrees C molding temperature, 1 kN pressing force, 5 mm/min moving speed, 60s temperature holding time, and a vacuum-free environment. This study also investigates the surface roughness of glass biochip channels. (C) 2011 Elsevier B.V. All rights reserved.
The Glass-Molding Process for Planar-Integrated Micro-Optical Component
(2011-01-01)
Huang, Chien-Yao
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Sze, Jyh-Rou
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Huang, Kuo-Cheng
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Kuo, Chao-Hui
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Tseng, Shih-Feng
This paper presents a precision glass-molding process to fabricate planar-integrated micro-optical components (PIMOC) applied to a micro projection display system, optical interconnection system and optical storage system. The PIMOC was designed based on wave propagation theory, and fabricated using a glass molding process. Experimental results are discussed in this article. The experiment showed that the PIMOC fabricated in a vacuum environment meets the design value with precision glass-molding technology (PGMT) at a molding force of 2.75 kN, a molding temperature of 750 degrees C and a cooling rate of 49 degrees C/min. (C) 2011 The Japan Society of Applied Physics