Browsing by Author "Kuo, LT"

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High reliability ultrathin interpolyoxynitride dielectrics prepared by N2O plasma annealing
(2003-12-01)
Wang, JC
;
Lee, JW
;
Kuo, LT
;
Lei, TF
;
Lee, CL
This work addresses the preparation of ultrathin (effective oxide thickness, 42 Angstrom) interpoly-oxynitride (SiOxNy) films by annealing thin nitride films with high density N2O plasma and N2O rapid thermal annealing. The proposed oxynitride dielectrics formed using N2O plasma annealing exhibited low gate leakage current, high breakdown electric field, long ten-year lifetime, and large effective barrier height. These superior properties can be attributed to the high concentration of oxygen incorporated in the poly-II/nitride interface and a reduction of the trap density of the interpoly-oxynitride films. The dielectric is a suitable substitute for the inter-polyoxide of electrically-erasable programmable read only memory. (C) 2003 The Electrochemical Society.
Low power consumption focusing actuator for a mini video camera
(2006-04-15)
Yu, HC
;
Lee, TY
;
Lin, SK
;
Kuo, LT
;
Wang, SJ
A novel low power consumption autofocusing actuator in a mini video camera is constructed in accordance with the result of a systematic design procedure of voice coil motors (VCM). This paper emphasizes the position control of such a VCM. The position feedback signals are provided by a magnetoresistive (MR) encoder. The position estimation algorithm (PEA) is developed to precisely decode the MR signals for the position of the moving part of the VCM. Different postures change the loading of the moving part of the VCM, so that an adaptive model-following control system based on the PEA is proposed to compensate for the loading variation. The experiments verify the fast dynamic performance and high power efficiency of the VCM. (C) 2006 American Institute of Physics.