Browsing by Author "Kuo, YF"

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Ba(Ti0.8Sn0.2)O-3 thin films prepared by radio-frequency magnetron sputtering for dynamic random access memory applications
(1999-05-01)
Kuo, YF
;
Tseng, TY
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
Polycrystalline thin films of Ba(Ti0.8Sn0.2)O-3 100 nm thick were deposited on Pt/TiO2/SiO2/Si(100) substrates by radio-frequency magnetron sputtering at various substrate temperatures. The films crystallized with high (111) diffraction intensity at a substrate temperature of 650 degrees C, had good crystalline quality, and exhibited a large dielectric constant. The dielectric constant and leakage current of the films increased with an increase of the intensity ratio of (111)/(110) peaks. This study also established a correlation between the dielectric constant, leakage current, and crystallinity of the films. (C) 1999 The Electrochemical Society. S1099-0062(98)11-098-2. All rights reserved.
Preparation and characterization of PLZT thin films by sol-gel processing
(1996-12-01)
Kuo, YF
;
Tseng, TY
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
The effect of acid catalysts on the sol-gel preparation of ferroelectric lead lanthanum zirconium titanate (PLZT) thin films was studied. High quality thin films were successfully produced by using suitable amounts of the drying control chemical additive formamide and also catalyst acids during the sol-gel processing followed by various annealing conditions. The dielectric constants of the PLZT (8/65/35) thin films produced in this study varied between 540 (100 kHz) for a film annealed at 600 degrees C for 30 mins to a maximum 870 degrees C (1 kHz), 700 (100 kHz) for a film annealed at 650 degrees C for 20 mins.
Statistical study on the temperature dependence of the turn-on characteristics for p-type LTPS TFTs
(2005)
Tai, YH
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Kuo, YF
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光電工程學系
;
Department of Photonics
Structure-related optical properties of rapid thermally annealed Ba0.7Sr0.3TiO3 thin films
(1999-11-01)
Kuo, YF
;
Tseng, TY
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
Polycrystalline thin films of Ba0.7Sr0.3TiO3 (BST) are deposited on SiO2/Si substrates by radio frequency magnetron sputtering. This work also examines how the O-2 atmosphere annealing temperature affects not only the crystalline and morphological properties, but also the refractive index and the optical band gap energy. The BST films possess the highest dense packing growth and near-bulk optical properties as the O-2 atmosphere annealing temperature increases. Analysis results indicate that the packing density and the refractive index of BST films increase as the annealing temperature increases, whereas the optical band gap energies apparently decreased. In addition, the dispersion of the refractive index is analyzed in terms of dispersion parameters using the single oscillator dispersion model of Wemple and DiDomentico. (C) 1999 Elsevier Science S.A. All rights reserved.