Browsing by Author "LIN, Horng-Chih"

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NONVOLATILE MEMORY DEVICE WITH NANOWIRE CHANNEL AND METHOD FOR FABRICATING THE SAME
(2009-03-12)
LIN, Horng-Chih
;
Su, Chun-Jung
;
Hsu, Hsin-Hwei
A nonvolatile memory device with nanowire channel and a method for fabricating the same are proposed, in which side etching is used to shrink side walls of a side-gate to form a nanowire pattern, thereby fabricating a nanowire channel on the dielectric of the side walls of the side-gate. A nonvolatile memory device with nanowire channel and dual-gate control can thus be achieved. This nonvolatile memory device can enhance data writing and erasing efficiency, and also has the capability of low voltage operation. Moreover, through a process of low cost and easy steps, highly reproducible and mass producible fabrication of nanowire devices can be accomplished.