Browsing by Author "Lee, Pei-Kang"

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A sandwiched buffer layer enabling pulsed ultraviolet- and visible-laser annealings for direct fabricating poly-Si field-effect transistors on the polyimide
(2017-07-10)
Kao, Ming-Hsuan
;
Huang, Wen-Hsien
;
Shieh, Jia-Min
;
Shen, Chang-Hong
;
Lee, Pei-Kang
A sandwiched buffer layer of SiO2/Al/SiO2 enables ultraviolet-laser crystallization and visible-laser activation for direct fabrication of a poly-Si flexible field-effect-transistor (fFET) on polyimides. The buffer layer can produce heat accumulation and laser reflection from the Al/SiO2 interface to facilitate grain growth and contact resistance reduction of poly-Si without damaging the polyimide substrate. The feature size of poly-Si fFET has shrunk to 400nm via laser annealing, with the on/off current-ratio exceeding 5 x 10(6) and a subthreshold swing of 190 mV/dec. Moreover, the transfer characteristics of fFET by tension stress can be maintained until the bending radius reaches over 15 mm. Published by AIP Publishing.