Browsing by Author "Li, Chung Yi"

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Sensing and structural properties of Ti-doped tin oxide (SnO2) membrane for bio-sensor applications
(2017-09-01)
Isabel, A. Panimaya Selvi
;
Kao, Chyuan Haur
;
Mahanty, Rama Krushna
;
Wu, Yew Chung Sermon
;
Li, Chung Yi
We investigated the effect of rapid thermal annealing (RTA) on the sensing and structural characteristics of Ti-doped SnO2 based electrolyte-insulator-semiconductor (EIS) pH sensors. The Ti-doped Tin oxide (SnO2) EIS sensor annealed at 700 degrees C post deposition annealing, exhibits the best sensing characteristics in terms of sensitivity, linearity, hysteresis and drift rate. This derives from Ti incorporation that improves the thin-film stoichiometry by reducing dangling bonds on the dielectric surface and improves the temperature stability. We further studied the structural, compositional, and morphological characteristics of the deposited thin-film. RTA treatment increases the sensitivity and linearity by creating larger grain size and higher number of surface sites. Sodium (Na+) and potassium (K+) sensing performance was also measured using the fabricated EIS sensors.