Browsing by Author "Li, Ming-Huang"

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Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications
(2012-06-01)
Lee, Yi-Chia
;
Li, Ming-Huang
;
Cheng, Y. T.
;
Hsu, Wensyang
;
Li, Sheng-Shian
In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show similar to 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.