Browsing by Author "Li, Sheng-Shian"

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A GENERALIZED FOUNDRY CMOS PLATFORM FOR CAPACITIVELY-TRANSDUCED RESONATORS MONOLITHICALLY INTEGRATED WITH AMPLIFIERS
(2010)
Chen, Wen-Chien
;
Chen, Che-Sheng
;
Wen, Kuei-Ann
;
Fan, Long-Sheng
;
Fang, Weileun
A generalized foundry CMOS-MEMS platform suited for integrated micromechanical resonator circuits have been developed for commercial multi-user purpose and demonstrated with a fast turnaround time and a variety of design flexibilities for resonator applications. With this platform, different configurations of capacitively-transduced resonators monolithically integrated with their associated amplifier circuits, spanning frequencies from 500kHz to 14.5MHz, have been realized with resonator Q\'s around 2,000. This platform specifically featured with various configurations of structural materials, different arrangements of mechanical boundary conditions, large transduction area, well-defined anchors, and performance enhancement scaling with IC fabrication technology, offers a variety of flexible design options suited for sensor and RF applications.
Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications
(2012-06-01)
Lee, Yi-Chia
;
Li, Ming-Huang
;
Cheng, Y. T.
;
Hsu, Wensyang
;
Li, Sheng-Shian
In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show similar to 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.