Browsing by Author "Li Chang-Hung"

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BIOCHEMICAL SENSOR AND METHOD OF MANUFACTURING THE SAME
(2012-09-06)
ZAN Hsiao-Wen
;
Tsai Chuang-Chuang
;
Meng Hsin-Fei
;
Yeh Chun-Cheng
;
Dai Ming-Zhi
A biochemical sensor and a method of manufacturing the same are disclosed. The biochemical sensor includes a substrate, a gate arranged on one side of the substrate, a gate insulating layer arranged on one side of the gate opposite to the substrate, an active layer arranged on one side of the gate insulating layer opposite to the gate, a source and a drain arranged on one side of the active layer opposite to the gate insulating layer, and a biochemical sensing layer arranged on one side of the active layer opposite to the gate insulating layer and between the source and the drain.