Browsing by Author "Liang, Yen-Ju"

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Size Scaling of Printed Microstructures Using a Lift-off Printing (LoP) Process
(2014-01-01)
Fu, Yu-Min
;
Liang, Yen-Ju
;
Cheng, Y. T.
;
Wu, Pu-Wei
;
材料科學與工程學系
Inkjet printing has been one of fascinating techniques for microfabrication owing to the characteristics of low manufacturing cost, low processing temperature, low material usage,. etc. [1, 2]. In this work, a Lift-off Printing (LoP) process combining conventional photolithography and inkjet printing processes is introduced to realize printed size-scalable silver microstructures with the line width of 5 up to 70 m and the resistivity of similar to 5.7 mu Omega.cm on a silicon substrate. In addition, an as-printed interdigitated capacitor with the electrode size and spacing of 10 mu m has been successfully demonstrated with a capacitance of 2.3 pF/mm(2)@10kHz.