Browsing by Author "Liao, Bo-Huei"

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Room temperature fabrication of titanium nitride thin films as plasmonic materials by high-power impulse magnetron sputtering
(2016-02-01)
Yang, Zih-Ying
;
Chen, Yi-Hsun
;
Liao, Bo-Huei
;
Chen, Kuo-Ping
;
照明與能源光電研究所
High-power impulse magnetron sputtering (HiPIMS) was used to deposit titanium nitride (TiN) thin films with high electron density as alternative plasmonic materials. TiN thin films with thicknesses of 20-40 nm were deposited with different average sputtering powers, and exhibited metallic-and dielectric-like optical properties. When the sputtering power was increased from 80 W to 300 W, denser polycrystalline TiN thin films were obtained at room temperature (RT) with a conductivity 25 times that of the low-sputtering-power film. With sufficient average power (>= 180 W), the films exhibited metallic-like optical properties, and a conductivity of >10(5) S/m. By using HiPIMS deposition, good-quality metallic-like TiN thin films could be fabricated at RT without heating the substrate. (C) 2016 Optical Society of America