Browsing by Author "Lin, Cheng-De"

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Model to determine the self-resonant frequency of micromachined spiral inductors
(2006-09-04)
Chen, C. C.
;
Lin, Cheng-De
;
Cheng, Y. T.
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
This letter presents an approach to characterize electron behaviors within polygonal micromachined spiral inductors in which self-resonance occurs. Combining with the concepts of anomalous dispersion, standing wave, and field scattering, the self-resonant frequency of the microinductors can be calculated by means of an associated analytical model. According to this model the self-resonant frequency (SRF) can be derived as the "free electron" frequency of the inductor material. Simulation and measurement results validate that the model can provide a satisfactory prediction to the SRF of polygonal micromachined spiral inductors. (c) 2006 American Institute of Physics.