Browsing by Author "Lin, Chia-Yang"

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Design and Fabrication of Micromachined LPD-based SnO2 Gas Sensor Integrated TaN with Micro-hotplate
(2012)
Chiou, Jin-Chern
;
Lin, Chia-Yang
;
Tsai, Shang-Wei
;
Hong, Wei-Che
;
Chiou, Jin-Chern
In this study, the design and fabrication of a micromachined LPD-based SnO2 gas sensor integrated with TaN micro-hotplate was carried out by utilizing MEMS technology. In the characteristics of the micro-heater, thermal response, thermal distribution and power consumption of heated TaN micro-heater were measured by FLIR systems. For the sensing characterization, the sensing responses of LPD-based SnO2 gas sensor with TaN micro-heater to H2S gas were measured in different operating temperatures. In sensing properties, the resistances of the gas sensor significantly change in the staircase concentration of H2S gas and which optimal operating temperature was 250 degrees C.
Development of Micro-hotplate with TaN Heater Based Cu-doped SnO2 Gas Sensor for Low Concentration of H2S Gas
(2013)
Chiou, Jin-Chern
;
Tsai, Shang-Wei
;
Lin, Chia-Yang
;
Chiou, Jin-Chern
;
電機學院
In this study, the MEMS-based SnO2 gas sensor with a TaN heater, MSGST, was designed and fabricated using micromachining technology. The heating performance of the TaN heater was measured using an IR thermometer. The response of the MSGST sensor to H2S gas was analyzed by obtaining the relationship between the resistance of the sensor and the gas concentration to determine the best design parameters. Experimental results indicate that a MEMS-based SnO2 gas sensor, integrating TaN with a micro-hotplate, was successfully implemented using micromachining technology. The TaN heater can operate at over 300 degrees C and produce a uniform thermal distribution on the micro-hotplate. The sensitivity of the MSGST sensor to the H2S gas is significantly improved using a Cu catalyst and the optimal design parameters (Sensing film = 100 mu m(2), Cu catalyst = 7.5 mM) are obtained by measuring the gas concentration characterization for each the designed sensor.
Liquid Phase Deposition Based SnO2 Gas Sensor Integrated With TaN Heater on a Micro-Hotplate
(2013-06-01)
Chiou, Jin-Chern
;
Tsai, Shang-Wei
;
Lin, Chia-Yang
;
電子工程學系及電子研究所
;
電控工程研究所
A micromachined liquid-phase deposition (LPD)-based SnO2 gas sensor that is integrated with a tantalum nitride (TaN) microheater on micro-hotplate is designed and fabricated using microelectromechanical systems technology. TaN is available in many traditional complementary metal oxide semiconductor designs, unlike many other microheater materials. For the initial time, TaN is used in semiconductor metal oxide gas sensor as a heater. The thermal response, thermal distribution, and power consumption of the TaN microheater are measured using a thermal imaging camera. The operating temperature of TaN micro-hotplate can exceed 500 degrees C and they have a favorable thermal distribution within the sensing area. The temperature variation over the sensing area for a TaN microheater with a size of 300 x 300 mu m is similar to 4% at 500 degrees C. Its power consumption is successfully decreased by adopting a structure with ratio of edge length of the membrane to that of the microheater of 2.5. The sensing responses of the LPD-based SnO2 gas sensor with the TaN microheater to H2S gas are measured at various operating temperatures. The optimal operating temperature of the designed gas sensors is in the range 250 degrees C-300 degrees C. The designed sensing film with an area of 100 x 100 mu m has greater sensitivity to a staircase concentration of H2S gas than those with the other two areas (200 x 200 mu m and 300 x 300 mu m).